E-Beam Evaporation Semiconductor Sample Jig
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A jig for holding semiconductor samples undergoing contact deposition via E-Beam evaporation.
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- Open Community License v1.1 + General Attribution v1
A jig for holding semiconductor wafer samples undergoing contact deposition via E-Beam evaporation. It holds square samples up to 8 mm in side length and 0.8 mm in thickness (if using samples slightly smaller than that, it would need to be fixed in place with something like Kapton tape for example). The masks are designed for producing samples for both Van der Pauw hall effect measurements and transfer length measurements.
It's intended to be fabricated from stainless steel (the carrier can be CNC'd and the masks laser cut), but I suppose you could also get away with a high temp plastic (potentially?) like a Nylon for example, though I'm not sure about warping & how the carrier would behave in the metallisation setup. For the carrier, you should also tap out M2 threads for four M2 screws to slot in and hold down the mask on top.
This model was created using Autodesk Inventor.