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Scroll Pump Exhaust Filter DN25 — image 1
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Scroll Pump Exhaust Filter DN25

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HEPA filter unit for Scroll Pump Exhaust (DN25)

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Model information

Category
Tools
License
Creative Commons — Public Domain

Container to hold HEPA filters and mount to exhaust (DN25) of scroll pump.

Intended purpose was to capture scroll tip dust and reduce contamination of floor. 

Our system is UHV and noble gasses. Not advised for systems that have flammables/explosives/toxic materials etc.
 

So far no affect on the foreline pressures and already seeing discoloration (scroll dust) of the HEPA filters after a few months. 

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